副教授
发布时间:2017-03-12 

职称:副教授
研究方向:超精密长度测量、微纳米计量测试
办公室:电院 2-343
办公电话:021-34207229
电子邮箱:xchen.ie@sjtu.edu.cn
个人主页:
招生情况:硕士生导师

个人介绍


1998年本科毕业于上海交通大学仪器工程系,1999年赴日本工作和学习,2007年在日本东京大学获得工学博士学位,2010年起任上海交通大学仪器科学与工程系副教授。参加工作以来一直从事精密测量学方向的研究和产品开发工作。在东京大学攻读硕博期间,参与了来自日本文部科学省、学术振兴会、新能源产业技术开发机构的多个课题的研究。在日期间供职于测量业界知名公司,主持及参与多项精密测量领域的先端课题。
 

主要成就


2007年3月: 2006年度日本精密工学会优秀论文奖(JSPE Best Paper Award 2006)
2007年11月:Award certification of Merit for the paper, ISMQC 2007, IMEKO
 

代表论文


  1. X.Chen, K.Takamasu,M.Nikaidou: Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor, Measurement Technology and Intelligent Instruments VI, Vols.295-296, pp 613-618, 2005.
  2. X.Chen, K.Takamasu, K.Kotani, T.Ishida:Study on Calibration of Planar Linear Motor (1st Report) - Profile Measurement of Plane Mirrors -,J JSPE,72(12), 1542-1546, 2006.
  3. X.Chen, K.Kotani,K.Takamasu:Study on Spatial Frequency Domain 2-point Method (1st Report)- Calibration of Systematic Error in Case of Combining Two Sets of 2-point Method -,J JSPE,73(6),563-568,2007.
  4. X.Chen, K.Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, Measurement Technology and Intelligent Instruments VIII, Vols.381-382, pp 569-572, 2008.
  5. S.Liu, K.Watanabe, X.Chen, S.Takahashi, K.Takamasu: Profile measurement of a wide-area resist surface using a multi-ball cantilever system, Precision Engineering, 33(1),50-55,2009.
  6. X.Chen, K.Kotani, S.Takahashi, K.Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology, 252-255, 2004.
  7. X.Chen, K.Kotani, K.Takamasu: Study on algorithm of reconstructing topography based on topography difference, 7th International Conference of the European Society for Precision Engineering and Nanotechnology, 365-368, 2007.
  8. K.Takamasu, K.Yoshida, T.Senoo, X.Chen: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, ISMQC, IMEKO, 178-183, 2007.
  9. X.Chen, K.Kotani, K.Takamasu: Study on Spatial Frequency Domain Two-point Method - Analysis of Systematic Error -,Proceedings of JSPE Semestrial Meeting, Vol.2006A, 195-196, 2006.
  10. X.Chen, K.Kotani, K.Takamasu: Straightness Measurement Using Simultaneous Equation Method (1st Report) - Two Sets of 2-point Method -,Proceedings of JSPE Semestrial Meeting, Vol.2007S, 347-348, 2007.
 
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